본문내용
▶ Descriptions :
Chiller is an automatic regulator controlling the temperature inside the wafer etching chamber. It is imperative semiconductor manufacturing equipment to produce high quality wafers
▶ Characteristics :
1) Temp. Range : -50℃ ~ +180℃
2) Temp. Stability : ±0.1℃
3) Safety : ETL, CE, SEMI-S2, etc.
Chiller is an automatic regulator controlling the temperature inside the wafer etching chamber. It is imperative semiconductor manufacturing equipment to produce high quality wafers
▶ Characteristics :
1) Temp. Range : -50℃ ~ +180℃
2) Temp. Stability : ±0.1℃
3) Safety : ETL, CE, SEMI-S2, etc.
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