Al2O3 절연체 두께에 따른 MOS Capacitor의 전기적 특성 분석

소개글

Al2O3 절연체 두께에 따른 MOS Capacitor의 전기적 특성 분석 에 대한 보고서 자료입니다.

목차

1. 실험목적

2. 실험과정

3. 결과분석

4. 결론

5. 참고문헌

본문내용

Purpose of the Experiment
Understanding the principle and characteristics of the MOS Capacitor
C-V, I-V analysis in accordance with the thickness of the Al2O3 insulator
Insulator thickness (6nm, 12nm, 18nm)
Experimental Background
MOS Capacitor
MOS Capacitor structure
MOS Capacitor principle
<중 략>
1. I-V Results Analysis
Negative Voltage applied
Break down tendency
Current increase section
current at thickness 12nm > currents at thickness 6nm and 18nm
Guess cause of the error
(1) Breakdown voltage
(2) Skin effect : Depending humidity or the shape of the surface, there is a large variation
(3) No annealing process
(4) It is dependent on the surronding conditions such as humidity and surface internal temperature

키워드

mos capacitor,   Al2O3 ,   절연체 두께,   전기적 특성