|
material which is printed by laser printer within point 10 letters. In this way, we tried to tests many times changing the thickness of PR coating and temperature, but failed to all trials. And then we thought the reason of fail, so change the UV light direction and OHP letters. We wrote the our pro
|
|
|
interaction
(1) High-energy ion/neutral particle bombardment
(2) Low-energy ion/neutral particle bombardment(〈100eV)
3. PACVD equipment requirements
4. Applications of PACVD
1) Wear resitance coating
2) Thermochemical processing
3) Deposition of mixtures and multilayer structures
5. S
|
|
|
n 은 Micro arraying , Coating, Bio material, Chip material 로 나뉠 수 있는데, 검색해서 나온 자료들을 모두 통합한 Biochip Fabrication을 가지고 분석을 하였다.
- 국가별 랭킹으로 분석을 한 결과 미국(US) 60건, 일본(JP) 45건, PCT(WO) 8건 으로 미국이 랭킹으로는
|
|
|
wear of uncoated, TiN coated, and (Ti,Al)N coated punching tools
(2) Sputtered decorative coatings
① TiN계는 장식용 코팅으로 많이 쓰이고 있다.
② 막의 빛깔은 기체 조성을 바꿈으로서 변화한다.
→ 탄소 함유 기체를 첨가, 다원계 target을 사용
③ TiZr이나 TiHf 합금
|
|
|
coating (two different rotations) the wafer with the Su-8 photoresist. The process of soft baking is performed according to the thickness of the coating. It is carried out in accordance with Table 1.(Heat each at 65° 95). When the process is finished, the wafer is cooled off from the outside. After
|
|
메뉴펼치기
