목차
1. 진공의 의미 / 어원
2. 진공학
3. 진공의 역사
4. 진공의 효과
5. 절대 진공도와 게이지 상의 진공도
6. 진공 증착 (evaporation)
7. 진공증착의 이론
8. 증착 장치
9. 참고문헌
2. 진공학
3. 진공의 역사
4. 진공의 효과
5. 절대 진공도와 게이지 상의 진공도
6. 진공 증착 (evaporation)
7. 진공증착의 이론
8. 증착 장치
9. 참고문헌
본문내용
, 전자빔, arc imaging, 레이저, exploding wire 의 타입으로 나뉜다.
9. 참고문헌
A.R.West, J. Appl. Electrochem, 3(1973)327
M. S. Whittingham, M. Fouletier, C. Cros, JP. Duchange, R. R. Hsaering and W. Worrell, in : Materials for Advanced Batteries, D. W. Murphy, K. Bradhead and B. C. H. steel ed. Plenum Press, NY (1980)343
V. R. Koch and S. B. Brummer, Elctrochem. Acta, 22 (1977)75
R. G. Burns and V. M. Burns, Manganese dioxide Symposium, 2 (1980) 97
P. Vouros and J. I. Master, J. Electrochem Soc. 116(1969)881
M. R. Arora and E. Giant, Thin Solid Films, 71(1980)103
KyuHo Hwang and SeungKi Joo, Proceedings of the 2nd PacificRim International Conference on Advanced Materials and Proceeding, 1995,1581
J.M.Reau and J.Portier, in: P.Hagenmiller and W.Van Gool(eds.), Solid Electrolytes, General Principles, Characterization, Materials Applications, Academic Press, New York,1978,p.313
J. Schoonman, K.E.D.Wapenaar, G.Overslinzen and G.J.Dicksen,
J.Electrochem.Soc.,126(1979)709.
T. Geisel, P. Fulde and I. Peschel, Adv.Phys.,29(1980)527.
B. Reuter and K. Hardel, Naturwiss.,48(1961)161.
R. A. Huggins, Electrochim. Acta, 22(1979)773
U. von Alpen, M. F. Bell and H. H. Hoefer, Solid State Ionics,34(1981)215
9. 참고문헌
A.R.West, J. Appl. Electrochem, 3(1973)327
M. S. Whittingham, M. Fouletier, C. Cros, JP. Duchange, R. R. Hsaering and W. Worrell, in : Materials for Advanced Batteries, D. W. Murphy, K. Bradhead and B. C. H. steel ed. Plenum Press, NY (1980)343
V. R. Koch and S. B. Brummer, Elctrochem. Acta, 22 (1977)75
R. G. Burns and V. M. Burns, Manganese dioxide Symposium, 2 (1980) 97
P. Vouros and J. I. Master, J. Electrochem Soc. 116(1969)881
M. R. Arora and E. Giant, Thin Solid Films, 71(1980)103
KyuHo Hwang and SeungKi Joo, Proceedings of the 2nd PacificRim International Conference on Advanced Materials and Proceeding, 1995,1581
J.M.Reau and J.Portier, in: P.Hagenmiller and W.Van Gool(eds.), Solid Electrolytes, General Principles, Characterization, Materials Applications, Academic Press, New York,1978,p.313
J. Schoonman, K.E.D.Wapenaar, G.Overslinzen and G.J.Dicksen,
J.Electrochem.Soc.,126(1979)709.
T. Geisel, P. Fulde and I. Peschel, Adv.Phys.,29(1980)527.
B. Reuter and K. Hardel, Naturwiss.,48(1961)161.
R. A. Huggins, Electrochim. Acta, 22(1979)773
U. von Alpen, M. F. Bell and H. H. Hoefer, Solid State Ionics,34(1981)215
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