Short Channel and Narrow Channel Effect

소개글

Short Channel and Narrow Channel Effect에 대한 보고서 자료입니다.

목차

1. Short channel and narrow channel effect

2. Effective threshold voltage
1) Short channel effect
2) Reverse short channel effect
3) Narrow channel effect

3. Effective drain current and saturation current
1) Channel length modulation
2) Velocity saturation
3) Effective mobility

4. Issues of short channel
1) Increased leakage current
2) Reliability problems associated with short channel structure

본문내용

Scaling down and short channel and narrow channel effect
Scaling down – channel length가 짧아지고 width가 줄어듦에 따라 기대하지 않았던 효과들이 나타나기 시작
1. Vth adjust
1) Short channel effect
- 2-dim charge sharing model
- Drain induced barrier lowing (DIBL)
2) Reverse short channel effect
- Lateral dopant nonuniformity due to dopant diffusion or segregation
3) Narrow channel effect
2. ID, IDsat, adjust
1) Pinch-off 이상의 VDS에서 Channel length modulation
2) Velocity saturation
3) Normal field에 의한 effective mobility
Year 2003 2005 2008 2011
Min. Feature size(nm) 120 100 70 5
Min. logic Vdd(V) 1.2-1.5 0.9-1.2 0.6-0.9 0.5-0.6
Gate oxide(nm) 1.5-1.9 1.1-1.5 0.8-1.2 0.6-0.8
Max Ioff,at 25’C (pA/um) 13 20 40 80
Gate sheet Res. (/sq) 4-6 4-6 4-6 4-6
Interconnect level 8 8-9 9 9-10
Junction depth(nm) 24-40 20-33 16-26 11-19

키워드

Effective threshold voltage,   Reverse short channel effect,   Channel length modulation,   Effective mobility,   Reliability problem,   Narrow channel effect,   Velocity saturation,   leakage current