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Thin Film Deposition, McGraw Hill Inc., 1995
4. Milton Ohring, The Materials Science of Thin Films, Academic Press, 1992 1. Introduction
1) CVD의 정의
2) CVD의 분류
2. Thermodynamics and Kinetics
1) Equilibrium Thermodynamics of Reactions
2) Chemical Reaction Kinetics
3. Therma
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