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Glow Region
4. Paschen’s law
Ⅲ. RF Discharge
1. Needs for RF
1.1 why not DC
1.2 Efficiency of RF discharge
1.3 13.56 MHz RF
2. Self Bias of RF electrodes
3. Matching Networks
4. Symmetrical and Asymmetrical systems
5. Voltage Distribution in RF system
6. RF Paschen’s Curve
Ⅳ. Ref
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