[박막공학]Lithography

소개글

[박막공학]Lithography에 대한 보고서 자료입니다.

목차

1. What are the main applications of soft lithography?
2. Identify and explain the factors affecting the resolution of electron beam lithography

본문내용

ost of the electrons in the material's atoms do not take part in the chemical bond, the interaction the interaction of an electron with the material is equivalent, in first approximation, to the interaction with the respective groups of free atoms. In an interactions model of this type the parameters of the material are simply the atomic numbers and the concentrations of the respective atoms .

키워드

Soft Lithography,   E-beam Lithography,   Electron Beam,   Beam,   박막공학,   재료공학