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▶ Descriptions :
Chiller is an automatic regulator controlling the temperature inside the wafer etching chamber. It is imperative semiconductor manufacturing equipment to produce high quality wafers
▶ Characteristics :
1) Temp. Range : -50℃ ~ +180℃
2) Temp. Stability : ±0.1℃
3) Safety
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Equipment)
1.4 전기전자제품 유해물질사용제한지침(RoHS ; Directive on Restriction of the use of certain Hazardous Substances in electrical and electric equipment)
1.5 통합제품정책(IPP ; Integrated Product Policy)
2. 선진기업의 환경제품 성공사례
2.1. 외국사례
2.2. 국내
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