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plasma
● Brief history of plasma research
2. Properties of Plasma
● Plasma state of matter
● Plasma characteristics
● Plasma temperature and density
3. Types of Plasma
● Astrophysical plasma
● Laboratory plasma
● Industrial plasma
4. Applications of Plasma
● Plasma in industry
● Pl
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Plasma Hot Machining for Difficult-to cut Materials, JSPE, 53, 01, 1987, pp. 78-84
1. K. H. Fuh, W. C. Chen, P. W. Liang, Temperature rise in twist drills with a finite element approach, International Communications in Heat and Mass Transfer 21(3), 1994, pp. 345-358
4. M. F. DeVries and S. M. Wu, Ev
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I. Plasma
1. Plasma
Plasma라는 말을 물리학 용어로 처음 사용한 사람은 미국의 물리학자 "Langmuir"(랑뮈어)로서, 전기적인 방전(discharge)으로 인해 생기는 전하를 띤 양이온과 전자들의 집단을 Plasma라고 한다. 물질 중 가장 낮은 에너지 상태는 고체
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temperature on ZnO film growth characteristics / Yoon, Giwan ,
Growth of bulk single crystals under by liquid phase / Sheibani, H
The nano-micro interface: bridging the micro and nano worlds / Fecht, Hans-Jorg. Wiley-VCH , 2004.
Elements of x-ray diffraction / B. D. Cullity.
Crystal Bank(Web pag
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Temperature
- Complex structure
Plasma Enhanced CVD(PECVD)
- Using a Plasma
- Low-Temperature
- High deposition rate
- Limited step coverage
Low Pressure CVD(LPCVD)
- Pressure : 0.5 ~ 1 Torr
- High step coverage
- High Uniformity
- Low deposition rate 1. What is the thin film?
2.
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