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4. Milton Ohring, The Materials Science of Thin Films, Academic Press, 1992 1. Introduction
1) CVD의 정의
2) CVD의 분류
2. Thermodynamics and Kinetics
1) Equilibrium Thermodynamics of Reactions
2) Chemical Reaction Kinetics
3. Thermal CVD
1) 압력에 따른 분류
2) Reactor 온도
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thermal-atmospheric-plasma-enhances-bone-fracture-healing/
https://www.innovationnewsnetwork.com/astrophysical-plasma-study-benefits-new-soft-x-ray-transition-energies/20371/
https://www.newscientist.com/article/2308243-deepmind-uses-ai-to-control-plasma-inside-tokamak-fusion-reactor/
https://www.pl
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Jeffrey A.Reimer
- Chemical Engineering Laboratory Ⅱ, SungKyunKwan Univ. chemical Engineering.
- Introduction to Distillation, http://Iorien.ncl.ac.uk/ming/distil/distil0.htm
- http://www.wikipedia.org 1. Objective
2. Theory
3. Apparatus
4. Procedure
5. Attention
6. Results
7. Discussion
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4*)
W(CO)6
Plasma CVD
WF6
Mo
(MoSix*)
열 CVD
MoCl5, H2 (SiH4*)
MoF6, H2(or Si)
5. 참 고 문 헌
[1] Goiyama Hiroshi, ‘CVD핸드북’, 반도출판사, 1993
[2] K.L.Choy, ‘Chemical Vapor depostion of coatings’, Progress in Materials
Science, 2003
[3] Stanley Middleman, K.Hochberg , 'Process Engineering
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Apparatus
Thermal conductivity measuring Apparatus
4. Procedure
Put the test piece between standard cylinders and check the connection of thermocouple. Open the valve#1 to supply the water to the head tank and the keep others closed. Open the valve#3 when the head tank overflows and confirm the flow
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